Went out today to shoot some landscapes. I blew the sensor off with a rocket blower before I left. When I was doing some PP after the shoot, I was doing some Dehazing on the sky and this is what showed up.
I'm going to do a wet cleaning and hopefully this is only dust, but this was about 20 shots into the shoot. If this is shutter debris I'm gonna be seriously pissed.
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I'll throw in my 2 cents.
The biggest one could very well be dust on the back of the lens. I very well remember having one like that that I tried to clean, blow off, clean until I switched lenses and noticed it had gone. Then looking carefully at the back of the lens I did notice the fluff ball.
For the other little specks, they look like possible smearing from your last wet cleaning. I did get some too when I started cleaning my sensors and it took me a bit of practice and a few trials of different products to get rid of them.
Now one thing that some people forget is that what you see on top of your images (usually the sky) where most the dust is more distracting is dust sitting in the BOTTOM of the sensor. Remember the physics (image reversed by lens). So my suggestion is that when you clean your sensors, put the camera upside down and take more care of the bottom of the sensor.
And third, shooting at f22 and then going dehazing will very much show too much...
I really don't see this as shutter debris, so I wouldn't be concerned.